Сharging of a macroparticle in cathodic arc sheath
The macroparticle (MP) contamination is the most important technological problem of cathodic vacuum arc deposition of coatings. The electrostatic reflection of MP from the substrate is considered as a possible reason for the reduction in number of MPs in the presence of reactive gas. It is shown t...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2018 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/147354 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Сharging of a macroparticle in cathodic arc sheath / E.V. Romashchenko, A.A. Bizyukov, I.О. Girka // Вопросы атомной науки и техники. — 2018. — № 4. — С. 176-180. — Бібліогр.: 27 назв. — англ. |