Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure
The results of study of the plasma parameters of radio frequency capacitive discharge with isolated electrodes in
 atmospheric-pressure argon by means of bremsstrahlung photometry in wavelength range 400…600 nm are
 presented. Time-averaged spatial distributions of the plasma electro...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
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| Cite this: | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure / V.Yu. Bazhenov, S.M. Gubarev, V.V. Tsiolko, D.S. Levko // Вопросы атомной науки и техники. — 2018. — № 6. — С. 259-262. — Бібліогр.: 9 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1860058318557413376 |
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| author | Bazhenov, V.Yu. Gubarev, S.M. Tsiolko, V.V. Levko, D.S. |
| author_facet | Bazhenov, V.Yu. Gubarev, S.M. Tsiolko, V.V. Levko, D.S. |
| citation_txt | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure / V.Yu. Bazhenov, S.M. Gubarev, V.V. Tsiolko, D.S. Levko // Вопросы атомной науки и техники. — 2018. — № 6. — С. 259-262. — Бібліогр.: 9 назв. — англ. |
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| description | The results of study of the plasma parameters of radio frequency capacitive discharge with isolated electrodes in
atmospheric-pressure argon by means of bremsstrahlung photometry in wavelength range 400…600 nm are
presented. Time-averaged spatial distributions of the plasma electron temperature are experimentally obtained for
low-current α-and high-current γ-modes of the discharge glow. The comparison of the experimental results with the
preliminary data of the discharge computer modeling by a particle-in-cell method is presented.
Наведено результати дослідження параметрів плазми високочастотного ємнісного розряду з
ізольованими електродами в аргоні атмосферного тиску методом фотометрії її гальмівного випромінювання
в спектральному діапазоні ≈ 400…600 нм. Експериментально отримано усереднені за часом просторові
розподіли температури електронів плазми в слабкострумовому α- та сильнострумовому γ-режимах горіння
розряду. Представлено порівняння експериментальних результатів з попередніми даними комп’ютерного
моделювання розряду методом часток у комірці.
Представлены результаты исследования параметров плазмы высокочастотного емкостного разряда с
изолированными электродами в аргоне атмосферного давления методом фотометрии ее тормозного
излучения в спектральном диапазоне ≈ 400…600 нм. Экспериментально получены усредненные по времени
пространственные распределения температуры электронов плазмы в слаботочном α- и сильноточном γрежимах горения разряда. Представлено сравнение экспериментальных результатов с предварительными
данными компьютерного моделирования разряда методом частиц в ячейке.
|
| first_indexed | 2025-12-07T17:02:48Z |
| format | Article |
| fulltext |
ISSN 1562-6016. ВАНТ. 2018. №6(118)
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2018, № 6. Series: Plasma Physics (118), p. 259-262. 259
PHOTOMETRIC DIAGNOSTICS OF PLASMA OF PLANAR
CAPACITIVE RF DISCHARGE IN ARGON AT 1 atm PRESSURE
V.Yu. Bazhenov1, S.M. Gubarev1, V.V. Tsiolko1, D.S. Levko2
1Institute of Physics NAS of Ukraine, Kyiv, Ukraine;
2CFDR Corporation, Huntsville, USA
E-mail: gubarev@iop.kiev.ua
The results of study of the plasma parameters of radio frequency capacitive discharge with isolated electrodes in
atmospheric-pressure argon by means of bremsstrahlung photometry in wavelength range 400…600 nm are
presented. Time-averaged spatial distributions of the plasma electron temperature are experimentally obtained for
low-current α-and high-current γ-modes of the discharge glow. The comparison of the experimental results with the
preliminary data of the discharge computer modeling by a particle-in-cell method is presented.
PACS: 52.80.Pi
INTRODUCTION
Capacitive radio-frequency (RF) atmospheric-
pressure discharges are widely used in different
technological processes such as plasma sterilization of
medical instruments [1, 2], surface treatment of various
materials [3, 4], creation of layers for liquid crystal
alignment [5], plasma-chemical processes etc. Such
discharge is one of the most attractive ones due to low
breakdown voltage, ability to create uniform plasma
with high concentration of active species in relatively
large volume, and low gas temperature.
One of the most important plasma parameters is the
electron temperature since it defines the rates of many
plasma-chemical reactions and, consequently,
concentrations of active species in the plasma. Efficient
non-perturbing method of determining the plasma
parameters is based on optical emission spectroscopy.
In the non-thermal weakly ionized plasma of
atmospheric-pressure RF discharge, main source of
continuum emission in visible spectrum range is one
originated from electron bremsstrahlung at neutral atom.
Intensity of such plasma emission in approximation of
maxwellian electron energy distribution function
(EEDF) is defined by the expression:
(1)
where ne is the electron concentration, na is the
concentration of working gas atoms, λ is the emission
wavelength, k – is the Boltzmann constant, Те is the
electron temperature, Qea is the neutral bremsstrahlung
cross section, E is the electron energy.
Photometric method of non-perturbing study of Те
spatial distribution was proposed in [6] and used in [7]
for determining this distribution in atmospheric-pressure
RF discharge plasma by measurement of its neutral
bremsstrahlung emission. At that, the discharge cross
section images were obtained by DSLR camera with
spectrum selection performed by sequentially used two
narrow band (1.5 nm FWHM) interference filters having
transmission maxima at 514.5 and 632.8 nm, and Те
distribution across the discharge was determined from
respective ratios of neutral bremsstrahlung intensities at
two selected wavelengths for each point of the discharge
image. In spite of the averaging data of multiple
discharge images in [7], the authors did not succeed in
obtaining good signal-to-noise ratio and presented only
rough noisy Te spatial distribution.
In the present paper, the method proposed in [6, 7] is
essentially improved due to the bremsstrahlung
emission spectrum selection performed by inherent
color separation of DSLR camera sensor in broad blue
and green spectrum bands (about 100 nm FWHM each).
At that, no additional spectrum filtering elements are
required, and single image of the discharge plasma
emission is sufficient for determining Te spatial
distribution with good signal-to-noise ratio.
The present paper continues our previous studies [8]
utilizing photometric methods for space-resolved
characterization of plasma parameters of RF
atmospheric pressure discharges. Time-averaged
electron temperature distributions are determined
experimentally for different regimes of the discharge
glow. These results are compared with the preliminary
data of the discharge numerical simulation performed
by a particle-in-cell (PIC) method.
1. EXPERIMENTAL SETUP AND METHODS
Scheme of the experimental setup is shown in Fig. 1.
Capacitive RF (13.56 MHz) discharge glowed between
two flat electrodes covered by 1 mm thick alumina
plates 5. The dimensions of each electrode were
1 x 5 cm and the gas gap between the plates was 1 mm.
Industrial RF generator 7 (MV-1.5, JSC “Selmi”)
operating at 13.56 MHz frequency was used for
powering the discharge. Voltage after matching unit 6
was varied in the range 0 to 1600 V RMS during our
experiments. The discharge electrodes were powered
via capacitive dividers (C1-C2, C3-C4). Volumetric
consumption of the working gas argon was controlled
by means of the gas feeding system and comprised 3
liters per minute.
Emission of the RF discharge plasma was registered
by means of the digital reflex camera Canon-EOS-350D
used at low sensitivity setting of 200 international
standardization organization (ISO) units for reducing
mailto:gubarev@iop.kiev.ua
260 ISSN 1562-6016. ВАНТ. 2018. №6(118)
camera sensor noise. Experimentally optimized
exposure time of 1/15 s provided time-averaged
detection of the discharge plasma emission. Discharge
space image at the camera sensor scaled 1:1 was formed
by quartz achromatic lens with 150 mm focal length and
15 mm diameter. Special attention was devoted to
obtaining depth of field (DOF) distance of 1 cm
required for correct (non-overlapped) observation of the
plasma emission from the whole discharge thickness.
Taking into account the uniform discharge glow over
the whole square of the electrodes, the above condition
should be fulfilled only in the direction perpendicular to
the discharge plane. For that purpose, the lens aperture
in this direction was reduced to 5 mm by means of
slit 2. Such arrangement enabled 1 cm diffraction
limited DOF, and corresponding resolution in the image
plane was about 50 m FWHM.
Fig. 1. A scheme of the experimental setup.
1 – DSLR camera; 2 – aperture; 3 – lens;
4 – plasma in the discharge space; 5 – dielectric
barriers; 6 – impedance matching unit;
7 – RF generator (13.56 MHz)
The camera sensor pixels responsible for red, green
and blue color channels are known to be arranged by
means of the Bayer color filter array so that each
elementary cell of the array consists of one blue, two
green and one red pixels. For enabling photometric
studies, the sensor readout should be done without any
post-processing. In our experiments, it was performed
by UFRaw software which linearly converted camera
RAW files to 16 bit per color channel TIFF images used
for subsequent consideration. In our experiments, only
blue and green color channels embracing about
400…600 nm spectrum range were used for
bremsstrahlung emission measurements because red
channel was affected by the presence of atomic argon
emission lines.
For precise photometric spectrum-integrated
measurements for particular color channel, one should
exactly know the spectrum sensitivity of each channel.
This calibration procedure was performed by MDR-23
monochromator combined with the standard
spectroscopic tungsten incandescent lamp (2850 K color
temperature). This system provided spectrum selection
with about 1 nm bandwidth tunable with 10 nm steps
over the spectrum range of interest. At each step, the
RAW image was taken and subsequently converted by
mentioned above procedure with UFRaw software use.
At that, all settings of the conversion were the same as
ones used later for bremsstrahlung emission study. The
spectrum sensitivity curves for particular camera
obtained by the calibration procedure are shown in
Fig. 2. Almost two times lower sensitivity of green
channel is due to the fact that digital readout of the
sensor in green channel is done from twice bigger
number of green pixels in Bayer array of the camera
sensor.
Fig. 2. Color channel spectral sensitivity of DSLR
camera Canon-EOS-350D. Solid line – for blue
channel, dash line – for green channel
As it was already noted, the discharge glows
uniformly over the whole square of the electrodes, so
that it could be characterized only by the spatial profile
measurements of blue to green readout ratio across the
electrode plane. Mentioned profile was obtained by
means of ImageJ software which performed data
averaging for about 3000 image pixels along the
electrode plane. This allowed us to obtain good signal-
to-noise ratio from the data of single discharge image
thus making the described approach attractive for
express consideration of the discharge plasma features.
For determining Te spatial distribution, one should
define the relation between the data of photometric
experiment and the electron temperature. Such
procedure has been done earlier in [6, 7] for the case of
the bremsstrahlung intensity measurements at two
spectrum points. We modified mentioned procedure for
the case of spectrum-integrated intensity measurements.
For that purpose, the ratios of blue to green values of
convolution between the bremsstrahlung plasma
emission spectrum calculated using (1) and wavelength
dependence of the camera sensor sensitivity for
respective color channel on wavelength q(λ) were
calculated for different Te. It should be noted that the
calculated ratio (εea(λ)·qblue(λ)) / (εea(λ)·qgreen(λ)) is a
function of the electron temperature Te and does not
depend on the electron concentration. Calculated in such
a way dependence for particular Canon EOS-350D
digital camera used in our experiments is presented in
Fig. 3. One can easily see from the dependence shape
that it can be used for unambiguous solving the inverse
problem, that is determining Te spatial distribution by
measured blue-to-green readout ratios from the
discharge image.
400 450 500 550 600
0
2000
4000
6000
8000
10000
Color channel sensitivity, a.u.
Wavelength, nm
ISSN 1562-6016. ВАНТ. 2018. №6(118) 261
0,8 1,0 1,2 1,4 1,6 1,8
0
1
2
3
4
5
6
ea*q
blue / ea*q
green
Te , eV
Fig. 3. Calculated relation between RF discharge
plasma electron temperature Te and blue-to-green
readout ratio of Canon EOS-350D camera sensor
2. EXPERIMENTAL DATA AND
DISCUSSION
The described above procedure allowed us to obtain
the time-averaged spatial distribution of the electron
temperature Te
exp
across the discharge gap as the
function of the discharge current density j (Fig. 4). It
should be noted that no additional averaging of the
experimental data was done along the direction denoted
as L in (see Fig. 4), and all existing irregularities were
exactly reproducible for repeatedly taken discharge
images for each discharge glow mode.
One can see that the transition from the low-current
α – (j = 37 mA/cm2) to the high-current γ-mode
(j = 147 mA/cm2) the electron temperature Te
exp
in the
bulk plasma gradually decreases from ≈ 1.6 to ≈ 1.2 eV.
The large-scale irregularities, that is, the asymmetry
with respect to the central plane of the discharge gap
(L = 0.5 mm), are most probably due to the technical
issues such as the influence of the electrically grounded
laboratory environment on horizontally placed
discharge unit. The small-scale irregularities are
definitely due to the discharge nature and could actually
have higher amplitude due to the imaging system
diffraction-limited optical resolution of about 50 m.
This fact could be also responsible for the absence of
Te
exp
maxima near the electrodes (L ≤ 0.1 mm and
L ≥ 0.9 mm) which might be expectable in high-current
discharge glow modes.
Here it is worth to clarify some peculiarities of the
method. Actually, electrons with the energies
corresponding to the experimentally determined Te
exp
(E < 2 eV) do not contribute to the studied
bremsstrahlung emission because their energy is
insufficient for light radiation in the visible spectrum
range. On another side, high energy electrons
(E >> 2 eV) also do not make essential contribution to
the plasma emission due to the rapid decrease of their
concentration ~ e
-E / kTe. Thus, obtained data make
direct characterization the discharge plasma only in the
limited range of the electron energy. Experimentally
obtained Te
exp
is essentially based on the assumption of
the Maxwellian EEDF. It is commonly accepted that the
actual EEDF in the intermediate α-γ and high-current γ-
mode of RF discharge can deviate from the Maxwellian
one. Actual influence of this circumstance on the
accuracy of the obtained results is a subject of future
investigations.
As the initial step of the validation of the obtained
experimental data, preliminary numerical simulation of
the RF discharge was carried out by PIC code [9] for the
simulation parameters close to the experimental data.
The spatial distribution of the time-averaged effective
electron temperature Te
calc
in the discharge gap is
shown in Fig. 5. This Te
calc
was defined as 2/3 of the
mean electron energy determined from the simulated
EEDF.
Fig. 5. Time-averaged spatial distribution of electron
temperature Te
calc
calculated by numerical simulation
of RF discharge plasma: 1 – α-γ-mode; 2 – γ-mode
It was found that simulated electron temperature
Te
calc
in the plasma bulk decreases for increasing
discharge current which is in qualitative agreement with
0,0 0,2 0,4 0,6 0,8 1,0
0,0
1,0
1,2
1,4
1,6
1,8
4
3
2
L, mm
Te
exp
, eV
1
Fig. 4. Time-averaged spatial distribution of
experimentally determined electron temperature Te
exp
for different discharge glow modes:
1 – j = 37 mA/cm2; 2 – j = 54 mA/cm2;
3 – j = 75 mA/cm2; 4 – j = 147 mA/cm2
0,0 0,2 0,4 0,6 0,8 1,0
0,0
1
2
3
4
2
Te
calc
, eV
L , mm
1
262 ISSN 1562-6016. ВАНТ. 2018. №6(118)
the results of our experimental studies. The modeling
has shown essential EEDF modulation during RF
oscillation cycle due to the fast relaxation of the
electron energy.
CONCLUSIONS
The advanced photometric method to determine the
plasma electron temperature in the atmospheric-pressure
RF discharge was proposed and tested. In this method,
the digital camera imaging of the electron – neutral
atom bremsstrahlung emission from the discharge space
in 400…600 nm spectrum range is recorded and
analyzed. The experimentally determined time-
averaged spatial distributions of the plasma electron
temperature in the planar capacitive RF discharge in the
atmospheric-pressure argon demonstrate gradual
temperature decrease from ≈ 1.6 to 1.2 eV at the
discharge glow mode transition from low-current α-
(j = 37 mA/cm2) to high-current γ-mode
(j = 147 mA/cm2). Spatial distributions of the plasma
electron temperature derived from numerical modeling
by means of PIC method are in qualitative agreement
with obtained experimental data.
Proposed photometric method of determining
plasma electron temperature value and spatial
distribution can be used as express technique for
diagnostics of weakly ionized plasma of atmospheric
pressure RF discharges and their optimization for
different practical applications.
REFERENCES
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Plasma Processes and Polymer. 2008, v. 5, № 4, p. 322-
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R.F. Hicks, G.S. Selwyn. Etching materials with an
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A. Kuzmichev, V. Piun, V. Tsiolko, O. Yaroshchuk.
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pressure plasma of capacitive RF discharge for liquid
crystal alignment // Problems of Atomic Science and
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6. S. Park, W. Choe, H. Kim, J.Y. Park. Continuum
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Technology. 2015, v. 24, № 3, p. 034003.
7. S. Park, W. Choe, S.Y. Moon, S.J. Yoo. Spatio-
temporally resolved electron temperature in argon radio-
frequency capacitive discharge at atmospheric pressure
// Plasma Sources Science and Technology. 2015, v. 24,
№ 3, p. 032006.
8. V.Yu. Bazhenov, S.M. Gubarev, V.V. Tsiolko,
R.Yu. Chaplinskiy. Spatial distribution of continuum
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in argon at 1 atm pressure: photometric study //
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Article received 28.09.2018
ФОТОМЕТРИЧЕСКАЯ ДИАГНОСТИКА ПЛАЗМЫ ПЛАНАРНОГО ЕМКОСТНОГО
ВЧ-РАЗРЯДА В АРГОНЕ ПРИ ДАВЛЕНИИ 1 атм
В.Ю. Баженов, С.Н. Губарев, В.В. Циолко, Д.С. Левко
Представлены результаты исследования параметров плазмы высокочастотного емкостного разряда с
изолированными электродами в аргоне атмосферного давления методом фотометрии ее тормозного
излучения в спектральном диапазоне ≈ 400…600 нм. Экспериментально получены усредненные по времени
пространственные распределения температуры электронов плазмы в слаботочном α- и сильноточном γ-
режимах горения разряда. Представлено сравнение экспериментальных результатов с предварительными
данными компьютерного моделирования разряда методом частиц в ячейке.
ФОТОМЕТРИЧНА ДІАГНОСТИКА ПЛАЗМИ ПЛАНАРНОГО ЄМНІСНОГО
ВЧ-РОЗРЯДУ В АРГОНІ ПРИ ТИСКУ 1 атм
В.Ю. Баженов, С.М. Губарєв, В.В. Ціолко, Д.С. Левко
Наведено результати дослідження параметрів плазми високочастотного ємнісного розряду з
ізольованими електродами в аргоні атмосферного тиску методом фотометрії її гальмівного випромінювання
в спектральному діапазоні ≈ 400…600 нм. Експериментально отримано усереднені за часом просторові
розподіли температури електронів плазми в слабкострумовому α- та сильнострумовому γ-режимах горіння
розряду. Представлено порівняння експериментальних результатів з попередніми даними комп’ютерного
моделювання розряду методом часток у комірці.
|
| id | nasplib_isofts_kiev_ua-123456789-149059 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T17:02:48Z |
| publishDate | 2018 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Bazhenov, V.Yu. Gubarev, S.M. Tsiolko, V.V. Levko, D.S. 2019-02-19T15:01:18Z 2019-02-19T15:01:18Z 2018 Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure / V.Yu. Bazhenov, S.M. Gubarev, V.V. Tsiolko, D.S. Levko // Вопросы атомной науки и техники. — 2018. — № 6. — С. 259-262. — Бібліогр.: 9 назв. — англ. 1562-6016 PACS: 52.80.Pi https://nasplib.isofts.kiev.ua/handle/123456789/149059 The results of study of the plasma parameters of radio frequency capacitive discharge with isolated electrodes in
 atmospheric-pressure argon by means of bremsstrahlung photometry in wavelength range 400…600 nm are
 presented. Time-averaged spatial distributions of the plasma electron temperature are experimentally obtained for
 low-current α-and high-current γ-modes of the discharge glow. The comparison of the experimental results with the
 preliminary data of the discharge computer modeling by a particle-in-cell method is presented. Наведено результати дослідження параметрів плазми високочастотного ємнісного розряду з
 ізольованими електродами в аргоні атмосферного тиску методом фотометрії її гальмівного випромінювання
 в спектральному діапазоні ≈ 400…600 нм. Експериментально отримано усереднені за часом просторові
 розподіли температури електронів плазми в слабкострумовому α- та сильнострумовому γ-режимах горіння
 розряду. Представлено порівняння експериментальних результатів з попередніми даними комп’ютерного
 моделювання розряду методом часток у комірці. Представлены результаты исследования параметров плазмы высокочастотного емкостного разряда с
 изолированными электродами в аргоне атмосферного давления методом фотометрии ее тормозного
 излучения в спектральном диапазоне ≈ 400…600 нм. Экспериментально получены усредненные по времени
 пространственные распределения температуры электронов плазмы в слаботочном α- и сильноточном γрежимах горения разряда. Представлено сравнение экспериментальных результатов с предварительными
 данными компьютерного моделирования разряда методом частиц в ячейке. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Низкотемпературная плазма и плазменные технологии Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure Фотометрична діагностика плазми планарного ємнісного ВЧ-розряду в аргоні при тиску 1 атм Фотометрическая диагностика плазмы планарного емкостного ВЧ-разряда в аргоне при давлении 1 атм Article published earlier |
| spellingShingle | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure Bazhenov, V.Yu. Gubarev, S.M. Tsiolko, V.V. Levko, D.S. Низкотемпературная плазма и плазменные технологии |
| title | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure |
| title_alt | Фотометрична діагностика плазми планарного ємнісного ВЧ-розряду в аргоні при тиску 1 атм Фотометрическая диагностика плазмы планарного емкостного ВЧ-разряда в аргоне при давлении 1 атм |
| title_full | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure |
| title_fullStr | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure |
| title_full_unstemmed | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure |
| title_short | Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure |
| title_sort | photometric diagnostics of plasma of planar capacitive rf discharge in argon at 1 atm pressure |
| topic | Низкотемпературная плазма и плазменные технологии |
| topic_facet | Низкотемпературная плазма и плазменные технологии |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/149059 |
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