Scanning Acoustic Microscopy of Annealing Effects for Aluminium Thin Film Deposited on Silicon Substrate

• Published in: Металлофизика и новейшие технологии
• Date: 2018
• Main Authors: Chafia Atailia, Lakhdar Deboub, Amar Boudour, Youcef Boumaiza
• Format: Article
• Language: English
• Published: Інститут металофізики ім. Г.В. Курдюмова НАН України 2018
• Subjects: Физико-технические основы эксперимента и диагностики
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/151871
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Scanning Acoustic Microscopy of Annealing Effects for Aluminium Thin Film Deposited on Silicon Substrate / Chafia Atailia, Lakhdar Deboub, Amar Boudour, Youcef Boumaiza // Металлофизика и новейшие технологии. — 2018. — Т. 40, № 10. — С. 1387-1399. — Бібліогр.: 20 назв. — англ.

Scanning acoustic microscope (SAM) has proved to be a powerful new technique for investigation and characterization of mechanical properties of materials, especially, the opaque ones. Non-destructive measurements can be carried out using SAM in the vicinity of materials’ surfaces or relatively deepe...