Structure and mechanical stresses in TaSi₂/Si multilayer

The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reductio...

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Veröffentlicht in:Functional Materials
Datum:2018
Hauptverfasser: Devizenko, A.Yu., Kopylets, I.A., Kondratenko, V.V., Pershyn, Y.P., Devizenko, I.Y., Zubarev, E.N., Savitskiy, B.A.
Format: Artikel
Sprache:English
Veröffentlicht: НТК «Інститут монокристалів» НАН України 2018
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Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/157428
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ.

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