Structure and mechanical stresses in TaSi₂/Si multilayer
The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reductio...
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| Published in: | Functional Materials |
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| Date: | 2018 |
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| Format: | Article |
| Language: | English |
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НТК «Інститут монокристалів» НАН України
2018
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/157428 |
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| Cite this: | Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ. |
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Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. 2019-06-20T03:27:17Z 2019-06-20T03:27:17Z 2018 Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ. 1027-5495 DOI:https://doi.org/10.15407/fm25.04.729 https://nasplib.isofts.kiev.ua/handle/123456789/157428 The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reduction of mechanical stresses in the multilayers by increasing of the substrate temperature and after thermal annealing was observed. The thickness of the multilayers and the annealing temperature at which ones separated from the substrate were shown. Thermal annealing is accompanied by changes of the multilayer construction and structure of layers. The deposition of depth graded multilayers with layer thickness distribution according to the Fresnel zone plate law has been performed. en НТК «Інститут монокристалів» НАН України Functional Materials Characterization and properties Structure and mechanical stresses in TaSi₂/Si multilayer Article published earlier |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
| title |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| spellingShingle |
Structure and mechanical stresses in TaSi₂/Si multilayer Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. Characterization and properties |
| title_short |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_full |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_fullStr |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_full_unstemmed |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_sort |
structure and mechanical stresses in tasi₂/si multilayer |
| author |
Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. |
| author_facet |
Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. |
| topic |
Characterization and properties |
| topic_facet |
Characterization and properties |
| publishDate |
2018 |
| language |
English |
| container_title |
Functional Materials |
| publisher |
НТК «Інститут монокристалів» НАН України |
| format |
Article |
| description |
The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reduction of mechanical stresses in the multilayers by increasing of the substrate temperature and after thermal annealing was observed. The thickness of the multilayers and the annealing temperature at which ones separated from the substrate were shown. Thermal annealing is accompanied by changes of the multilayer construction and structure of layers. The deposition of depth graded multilayers with layer thickness distribution according to the Fresnel zone plate law has been performed.
|
| issn |
1027-5495 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/157428 |
| citation_txt |
Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ. |
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| first_indexed |
2025-11-27T17:09:37Z |
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2025-11-27T17:09:37Z |
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