Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target
The effect of the gas mixture composition on the structure, chemical bond character and hardness of Si–B–C–N films was systematically studied. A series of Si–B–C–N films was deposited by reactive dc magnetron sputtering of the target composed of Si disc with B₄C chips placed in the sputtering zone o...
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| Published in: | Сверхтвердые материалы |
|---|---|
| Date: | 2019 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут надтвердих матеріалів ім. В.М. Бакуля НАН України
2019
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/167298 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target / A.A. Onoprienko, V.I. Ivashchenko, A.O. Kozak, A.K. Sinelnichenko, T.V. Tomila // Надтверді матеріали. — 2019. — № 2 (238). — С. 29-38. — Бібліогр.: 34 назв. — англ. |