Investigation of the influence of Ar pressure on vacuum-arc plasma with Cr-, Cu-, and Zr-cathodes

• Published in: Вопросы атомной науки и техники
• Date: 2019
• Main Authors: Kovtun, Yu.V., Kuprin, A.S., Lunev, V.M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194705
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Investigation of the influence of Ar pressure on vacuum-arc plasma with Cr-, Cu-, and Zr-cathodes / Yu.V. Kovtun, A.S. Kuprin, V.M. Lunev // Problems of atomic science and technology. — 2019. — № 1. — С. 145-148. — Бібліогр.: 25 назв. — англ.

The work deals with the influence of argon pressure on the ion current of vacuum-arc discharge in the “Bulat-6” setup with Cr-Cu-Zr-cathodes, and also, on the rate of coating deposition on the surfaces being perpendicular and parallel to the plasma stream. It is shown that a substantial decrease in...