The microplasma aluminum and titanium oxidation in condensed environments
The plant intended for the microplasma oxidation of the materials whose oxides possess semiconductor properties has been developed. The coatings consisting of corundum Al²O³-α (hexagonal syngony) and the two transition modifications of aluminum oxide Al²O³-η (cubic syngony) and Al²O³-θ (monoclinic s...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2020 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2020
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/194754 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | The microplasma aluminum and titanium oxidation in condensed environments / D.V. Vinnikov, A.N. Ozerov, V.B. Yuferov, V.T. Fomin // Problems of atomic science and tecnology. — 2020. — № 1. — С. 178-184. — Бібліогр.: 7 назв. — англ. |