Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum
Structural and phase changes in thin films obtained by magnetron sputtering of a target with the composition Ti41Zr38.3Ni20.7 (at.%) were studied under isothermal vacuum annealing in the temperature range from 400 to 800 °C. The boundaries of the thermal stability of the phases have been determined....
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| Veröffentlicht in: | Вопросы атомной науки и техники |
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| Datum: | 2022 |
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2022
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/195827 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum / S.V. Malykhin, V.V. Kondratenko, I.A. Kopylets, Yu.S. Bogdanov, S.V. Surovitsky, S.S. Borisova, I.G. Shipkova // Problems of Atomic Science and Technology. — 2022. — № 1. — С. 21-25. — Бібліогр.: 17 назв. — англ. |