Morphology and sputtering of tungsten nitrides coatings exposed to deuterium plasma
Processes of sputtering, surface modification and change in the stoichiometric composition of W and WN coatings deposited on stainless steel by cathodic arc evaporation were studied under the influence of low-energy (500 eV/D) deuterium plasma with fluence of (1…4.5)·10²⁴ D₂⁺/m² at room temperature....
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| Date: | 2023 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2023
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| Series: | Problems of Atomic Science and Technology |
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/196049 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Morphology and sputtering of tungsten nitrides coatings exposed to deuterium plasma / G.D. Tolstolutskaya, A.S. Kuprin, A.V. Nikitin, R.L. Vasilenko // Problems of Atomic Science and Technology. — 2023. — № 1. — С. 57-62. — Бібліогр.: 25 назв. — англ. |