The influence of ethylene glycol on the chemical interaction of PbTe and Pb₁₋ₓSnₓTe crystals with H₂O₂–HBr–ethylene glycol etching compositions
The process of cutting, mechanical and chemical treatment of the PbTe and Pb₁₋ₓSnₓTe crystal surface has been studied. The dependences of the chemical-mechanical polishing rate versus dilution of the base polishing etchant H₂O₂–HBr–ethylene glycol by the ethylene glycol have been determined. The sur...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Date: | 2017 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2017
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/214906 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | The influence of ethylene glycol on the chemical interaction of PbTe and Pb₁₋ₓSnₓTe crystals with H₂O₂–HBr–ethylene glycol etching compositions / G.P. Malanych, V.M. Tomashyk, O.S. Lytvyn // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 1. — С. 91-95. — Бібліогр.: 10 назв. — англ. |
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