The influence of physical and technological magnetron sputtering modes on the structure and optical properties of CdS and CdTe films
To create technology for the preparation of CdS and CdTe thin films by direct current magnetron sputtering, the influence of physical and technological condensation modes on the crystal structure and optical properties of these films was investigated. The laboratory method of DC magnetron sputtering...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Datum: | 2017 |
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2017
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/214920 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | The influence of physical and technological magnetron sputtering modes on the structure and optical properties of CdS and CdTe films / G.S. Khrypunov, G.I. Kopach, M.M. Harchenko, A.І. Dobrozhan // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 2. — С. 262-267. — Бібліогр.: 10 назв. — англ. |