Nanostructuring the SiOₓ layers by using laser-induced self-organization

The processes of laser-induced transformation of SiOₓ oxide layers into the nanocomposite ones were studied. The possibility of phase separation in the form of Si nanocrystals surrounded by corresponding SiO₂ oxide matrix under irradiation by nanosecond pulses of YAG:Nd⁺³-laser were shown. Laser rad...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2017
Hauptverfasser: Steblova, O.V., Fedorenko, L.L., Evtukh, A.A.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2017
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/214936
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Nanostructuring the SiOₓ layers by using laser-induced self-organization / O.V. Steblova, L.L. Fedorenko, A.A. Evtukh // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 2. — С. 179-184. — Бібліогр.: 27 назв. — англ.

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