Oxygen ion-beam modification of vanadium oxide films for reaching a high value of the resistance temperature coefficient

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2017
• Main Authors: Sabov, T.M., Oberemok, O.S., Dubikovskyi, O.V., Melnik, V.P., Kladko, V.P., Romanyuk, B.M., Popov, V.G., Gudymenko, O.Yo., Safriuk, N.V.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2017
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/214940
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Oxygen ion-beam modification of vanadium oxide films for reaching a high value of the resistance temperature coefficient / T.M. Sabov, O.S. Oberemok, O.V. Dubikovskyi, V.P. Melnik, V.P. Kladko, B.M. Romanyuk, V.G. Popov, O.Yo. Gudymenko, N.V. Safriuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 2. — С. 153-158. — Бібліогр.: 13 назв. — англ.

A new method to prepare vanadium oxide with a high temperature coefficient of resistance (TCR) and low resistance for uncooled micro-bolometers has been proposed. Amorphous vanadium oxide films with V₂O₃ phase inclusions have been fabricated on silicon and silica substrates at a temperature of 200 °...