Peculiarities of nanocrystalline silicon films growth on porous anodic alumina surface

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2017
• ISSN: 1560-8034
• Main Authors: Parfenyuk, P.V., Evtukh, A.A., Korobchuk, I.M., Glotov, V.I., Strelchuk, V.V.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2017
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/214950
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Peculiarities of nanocrystalline silicon films growth on porous anodic alumina surface / P.V. Parfenyuk, A.A. Evtukh, I.M. Korobchuk, V.I. Glotov, V.V. Strelchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 3. — С. 330-334. — Бібліогр.: 19 назв. — англ.

The influence of porous alumina template morphology on silicon film growth during deposition by PE CVD has been investigated. As it was shown, the structural properties of silicon phases depend on the pore geometry and surface morphology of the anodized porous alumina substrate. In the case of porou...