Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures
The comparative analysis of optical characteristics inherent to Er₂O₃/SiC and Er₂O₃/por-SiC/SiC structures has been performed. It has been shown that, regardless of the substrate on which the Er₂O₃ film is formed, an increase in the rapid thermal annealing time leads to an improvement in the oxide f...
Saved in:
| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2017 |
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2017
|
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/214993 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures / Yu.Yu. Bacherikov, R.V. Konakova, O.B. Okhrimenko, N.I. Berezovska, L.M. Kapitanchuk, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 4. — С. 465-469. — Бібліогр.: 27 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862640865411858432 |
|---|---|
| author | Bacherikov, Yu.Yu. Konakova, R.V. Okhrimenko, O.B. Berezovska, N.I. Kapitanchuk, L.M. Svetlichnyi, A.M. |
| author_facet | Bacherikov, Yu.Yu. Konakova, R.V. Okhrimenko, O.B. Berezovska, N.I. Kapitanchuk, L.M. Svetlichnyi, A.M. |
| citation_txt | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures / Yu.Yu. Bacherikov, R.V. Konakova, O.B. Okhrimenko, N.I. Berezovska, L.M. Kapitanchuk, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 4. — С. 465-469. — Бібліогр.: 27 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | The comparative analysis of optical characteristics inherent to Er₂O₃/SiC and Er₂O₃/por-SiC/SiC structures has been performed. It has been shown that, regardless of the substrate on which the Er₂O₃ film is formed, an increase in the rapid thermal annealing time leads to an improvement in the oxide film composition, with the composition of the Er₂O₃ film approaching the stoichiometric one. At the same time, the introduction of an additional porous SiC layer leads to a blurring of the oxide film/substrate interface and broadening of the photoluminescence band measured in this structure.
|
| first_indexed | 2026-03-21T13:46:07Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-214993 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2026-03-21T13:46:07Z |
| publishDate | 2017 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Bacherikov, Yu.Yu. Konakova, R.V. Okhrimenko, O.B. Berezovska, N.I. Kapitanchuk, L.M. Svetlichnyi, A.M. 2026-03-06T09:50:21Z 2017 Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures / Yu.Yu. Bacherikov, R.V. Konakova, O.B. Okhrimenko, N.I. Berezovska, L.M. Kapitanchuk, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 4. — С. 465-469. — Бібліогр.: 27 назв. — англ. 1560-8034 PACS: 77.55.-g, 78.55.Qr, 81.15.-z https://nasplib.isofts.kiev.ua/handle/123456789/214993 https://doi.org/10.15407/spqeo20.04.465 The comparative analysis of optical characteristics inherent to Er₂O₃/SiC and Er₂O₃/por-SiC/SiC structures has been performed. It has been shown that, regardless of the substrate on which the Er₂O₃ film is formed, an increase in the rapid thermal annealing time leads to an improvement in the oxide film composition, with the composition of the Er₂O₃ film approaching the stoichiometric one. At the same time, the introduction of an additional porous SiC layer leads to a blurring of the oxide film/substrate interface and broadening of the photoluminescence band measured in this structure. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures Article published earlier |
| spellingShingle | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures Bacherikov, Yu.Yu. Konakova, R.V. Okhrimenko, O.B. Berezovska, N.I. Kapitanchuk, L.M. Svetlichnyi, A.M. |
| title | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures |
| title_full | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures |
| title_fullStr | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures |
| title_full_unstemmed | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures |
| title_short | Optical properties of thin erbium oxide films formed by rapid thermal annealing on SiC substrates with different structures |
| title_sort | optical properties of thin erbium oxide films formed by rapid thermal annealing on sic substrates with different structures |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/214993 |
| work_keys_str_mv | AT bacherikovyuyu opticalpropertiesofthinerbiumoxidefilmsformedbyrapidthermalannealingonsicsubstrateswithdifferentstructures AT konakovarv opticalpropertiesofthinerbiumoxidefilmsformedbyrapidthermalannealingonsicsubstrateswithdifferentstructures AT okhrimenkoob opticalpropertiesofthinerbiumoxidefilmsformedbyrapidthermalannealingonsicsubstrateswithdifferentstructures AT berezovskani opticalpropertiesofthinerbiumoxidefilmsformedbyrapidthermalannealingonsicsubstrateswithdifferentstructures AT kapitanchuklm opticalpropertiesofthinerbiumoxidefilmsformedbyrapidthermalannealingonsicsubstrateswithdifferentstructures AT svetlichnyiam opticalpropertiesofthinerbiumoxidefilmsformedbyrapidthermalannealingonsicsubstrateswithdifferentstructures |