Comparative characteristics of TiO₂(Er₂O₃, Dy₂O₃)/por-SiC/SiC heterostructures (Review)
In this work, comparative characteristics of thin oxide films (OF) of titanium, erbium, and dysprosium formed on silicon carbide substrates in the presence and absence of a porous silicon carbide (por-SiC) layer have been considered. It has been shown that regardless of the presence of a porous buff...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2020 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2020
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/215860 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Comparative characteristics of TiO₂(Er₂O₃, Dy₂O₃)/por-SiC/SiC heterostructures (Review) / Yu.Yu. Bacherikov, R.V. Konakova, O.B. Okhrimenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2020. — Т. 23, № 3. — С. 253-259. — Бібліогр.: 29 назв. — англ. |