Characterization of nano-bio silicon carbide

Plasma-enhanced chemical vapor deposition, reactive magnetron sputtering, hotwire chemical vapor deposition, and radio frequency plasma-enhanced chemical vapor deposition were used to develop technology for the preparation of nano-bio silicon carbide coating of ceramic materials for dental applicati...

Full description

Saved in:
Bibliographic Details
Published in:Semiconductor Physics Quantum Electronics & Optoelectronics
Date:2020
Main Authors: Vlaskina, S.I., Mishinova, G.N., Shaginyan, I.L., Smertenko, P.S., Svechnikov, G.S.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2020
Subjects:
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/215918
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Characterization of nano-bio silicon carbide / S.I. Vlaskina, G.N. Mishinova, I.L. Shaginyan, P.S. Smertenko, G.S. Svechnikov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2020. — Т. 23, № 4. — С. 346-354. — Бібліогр.: 29 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine