Characterization of nano-bio silicon carbide
Plasma-enhanced chemical vapor deposition, reactive magnetron sputtering, hotwire chemical vapor deposition, and radio frequency plasma-enhanced chemical vapor deposition were used to develop technology for the preparation of nano-bio silicon carbide coating of ceramic materials for dental applicati...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2020 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2020
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/215918 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Characterization of nano-bio silicon carbide / S.I. Vlaskina, G.N. Mishinova, I.L. Shaginyan, P.S. Smertenko, G.S. Svechnikov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2020. — Т. 23, № 4. — С. 346-354. — Бібліогр.: 29 назв. — англ. |