Phase transition in vanadium oxide films formed by multistep deposition
VOₓ films deposited using the multistep method have been investigated. These films were prepared by repeating the two-stage method of low-temperature deposition and low-temperature annealing. The structure and characteristics of VOₓ thin films have been studied. Taking into account the obtained resu...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Date: | 2021 |
| Main Authors: | , , , , , , , , , , , |
| Format: | Article |
| Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2021
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/216302 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Phase transition in vanadium oxide films formed by multistep deposition / V.P. Kladko, V.P. Melnik, О.I. Liubchenko, B.M. Romanyuk, О.Yo. Gudymenko, Т.M. Sabov, О.V. Dubikovskyi, Z.V. Maksimenko, О.V. Kosulya, O.A. Kulbachynskyi, P.M. Lytvyn, О.O. Efremov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2021. — Т. 24, № 4. — С. 362-371. — Бібліогр.: 38 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862534823901396992 |
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| author | Kladko, V.P. Melnik, V.P. Liubchenko, О.I. Romanyuk, B.M. Gudymenko, О.Yo. Sabov, Т.M. Dubikovskyi, О.V. Maksimenko, Z.V. Kosulya, О.V. Kulbachynskyi, O.A. Lytvyn, P.M. Efremov, О.O. |
| author_facet | Kladko, V.P. Melnik, V.P. Liubchenko, О.I. Romanyuk, B.M. Gudymenko, О.Yo. Sabov, Т.M. Dubikovskyi, О.V. Maksimenko, Z.V. Kosulya, О.V. Kulbachynskyi, O.A. Lytvyn, P.M. Efremov, О.O. |
| citation_txt | Phase transition in vanadium oxide films formed by multistep deposition / V.P. Kladko, V.P. Melnik, О.I. Liubchenko, B.M. Romanyuk, О.Yo. Gudymenko, Т.M. Sabov, О.V. Dubikovskyi, Z.V. Maksimenko, О.V. Kosulya, O.A. Kulbachynskyi, P.M. Lytvyn, О.O. Efremov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2021. — Т. 24, № 4. — С. 362-371. — Бібліогр.: 38 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | VOₓ films deposited using the multistep method have been investigated. These films were prepared by repeating the two-stage method of low-temperature deposition and low-temperature annealing. The structure and characteristics of VOₓ thin films have been studied. Taking into account the obtained results, theoretical modeling of the structure was performed, and the parameters of the metal-insulator transition have been calculated.
Досліджено плівки VOₓ, нанесені багатоступеневим методом. Ці плівки було отримано методом двоетапного низькотемпературного осадження з наступним низькотемпературним відпалом. Досліджено структуру та характеристики тонких плівок VOₓ. З урахуванням отриманих результатів проведено теоретичне моделювання структури та розраховано параметри переходу метал-ізолятор.
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| first_indexed | 2026-04-15T11:13:44Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-216302 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2026-04-15T11:13:44Z |
| publishDate | 2021 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Kladko, V.P. Melnik, V.P. Liubchenko, О.I. Romanyuk, B.M. Gudymenko, О.Yo. Sabov, Т.M. Dubikovskyi, О.V. Maksimenko, Z.V. Kosulya, О.V. Kulbachynskyi, O.A. Lytvyn, P.M. Efremov, О.O. 2026-04-13T09:16:10Z 2021 Phase transition in vanadium oxide films formed by multistep deposition / V.P. Kladko, V.P. Melnik, О.I. Liubchenko, B.M. Romanyuk, О.Yo. Gudymenko, Т.M. Sabov, О.V. Dubikovskyi, Z.V. Maksimenko, О.V. Kosulya, O.A. Kulbachynskyi, P.M. Lytvyn, О.O. Efremov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2021. — Т. 24, № 4. — С. 362-371. — Бібліогр.: 38 назв. — англ. 1560-8034 PACS: 61.05.cp, 64.75.St, 68.55.-a, 73.61.-r, 81.15.Aa, 81.15.-z https://nasplib.isofts.kiev.ua/handle/123456789/216302 https://doi.org/10.15407/spqeo24.04.362 VOₓ films deposited using the multistep method have been investigated. These films were prepared by repeating the two-stage method of low-temperature deposition and low-temperature annealing. The structure and characteristics of VOₓ thin films have been studied. Taking into account the obtained results, theoretical modeling of the structure was performed, and the parameters of the metal-insulator transition have been calculated. Досліджено плівки VOₓ, нанесені багатоступеневим методом. Ці плівки було отримано методом двоетапного низькотемпературного осадження з наступним низькотемпературним відпалом. Досліджено структуру та характеристики тонких плівок VOₓ. З урахуванням отриманих результатів проведено теоретичне моделювання структури та розраховано параметри переходу метал-ізолятор. The present work was supported by the National Research Foundation of Ukraine (project No 2020.02/0054). en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Semiconductor physics Phase transition in vanadium oxide films formed by multistep deposition Фазовий перехід у плівках оксиду ванадію, утворених багатоступеневим осадженням Article published earlier |
| spellingShingle | Phase transition in vanadium oxide films formed by multistep deposition Kladko, V.P. Melnik, V.P. Liubchenko, О.I. Romanyuk, B.M. Gudymenko, О.Yo. Sabov, Т.M. Dubikovskyi, О.V. Maksimenko, Z.V. Kosulya, О.V. Kulbachynskyi, O.A. Lytvyn, P.M. Efremov, О.O. Semiconductor physics |
| title | Phase transition in vanadium oxide films formed by multistep deposition |
| title_alt | Фазовий перехід у плівках оксиду ванадію, утворених багатоступеневим осадженням |
| title_full | Phase transition in vanadium oxide films formed by multistep deposition |
| title_fullStr | Phase transition in vanadium oxide films formed by multistep deposition |
| title_full_unstemmed | Phase transition in vanadium oxide films formed by multistep deposition |
| title_short | Phase transition in vanadium oxide films formed by multistep deposition |
| title_sort | phase transition in vanadium oxide films formed by multistep deposition |
| topic | Semiconductor physics |
| topic_facet | Semiconductor physics |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/216302 |
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