Phase transition in vanadium oxide films formed by multistep deposition

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2021
• Main Authors: Kladko, V.P., Melnik, V.P., Liubchenko, О.I., Romanyuk, B.M., Gudymenko, О.Yo., Sabov, Т.M., Dubikovskyi, О.V., Maksimenko, Z.V., Kosulya, О.V., Kulbachynskyi, O.A., Lytvyn, P.M., Efremov, О.O.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2021
• Subjects: Semiconductor physics
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/216302
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Phase transition in vanadium oxide films formed by multistep deposition / V.P. Kladko, V.P. Melnik, О.I. Liubchenko, B.M. Romanyuk, О.Yo. Gudymenko, Т.M. Sabov, О.V. Dubikovskyi, Z.V. Maksimenko, О.V. Kosulya, O.A. Kulbachynskyi, P.M. Lytvyn, О.O. Efremov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2021. — Т. 24, № 4. — С. 362-371. — Бібліогр.: 38 назв. — англ.

VOₓ films deposited using the multistep method have been investigated. These films were prepared by repeating the two-stage method of low-temperature deposition and low-temperature annealing. The structure and characteristics of VOₓ thin films have been studied. Taking into account the obtained resu...