Technological accelerator with closed electron drift for surface treatment
Now the technologies of functional covers deriving on large surfaces intensively are developed. For these purposes the plasma sputtering systems of magnetron, vacuum - arc, electron -beam and other types are effectively used. The quality of cover largely depends on preliminary treatment of a surface...
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| Опубліковано в: : | Вопросы атомной науки и техники |
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| Дата: | 2000 |
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/78561 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Technological accelerator with closed electron drift for surface treatment / A.A. Goncharov, A.M. Dobrovolskii, S.N. Pavlov, O.A. Panchenko, I.M. Protsenko // Вопросы атомной науки и техники. — 2000. — № 6. — С. 160-162. — Бібліогр.: 3 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862619251569852416 |
|---|---|
| author | Goncharov, A.A. Dobrovolskii, A.M. Pavlov, S.N. Panchenko, O.A. Protsenko, I.M. |
| author_facet | Goncharov, A.A. Dobrovolskii, A.M. Pavlov, S.N. Panchenko, O.A. Protsenko, I.M. |
| citation_txt | Technological accelerator with closed electron drift for surface treatment / A.A. Goncharov, A.M. Dobrovolskii, S.N. Pavlov, O.A. Panchenko, I.M. Protsenko // Вопросы атомной науки и техники. — 2000. — № 6. — С. 160-162. — Бібліогр.: 3 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Now the technologies of functional covers deriving on large surfaces intensively are developed. For these purposes the plasma sputtering systems of magnetron, vacuum - arc, electron -beam and other types are effectively used. The quality of cover largely depends on preliminary treatment of a surface - its clearing and activation. In the paper is shown, that the anode layer thruster (or the anode layer accelerator – ALA) intensively cleans a surface of target body in a narrow pressure range of working gas in a system. On absolute rate of cleaning (~ 1 nm/s) ALA do not concede to a Kaufman sources. The injection of gas in the accelerator through electrodes with success can be replaced by injection immediately in volume. In this case the rates of sputtering increase approximately twice. The optimal pressure for cleaning essentially will increase, that does ALA compatible with a magnetron on pressure of working gases.
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| first_indexed | 2025-12-07T13:16:14Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-78561 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T13:16:14Z |
| publishDate | 2000 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Goncharov, A.A. Dobrovolskii, A.M. Pavlov, S.N. Panchenko, O.A. Protsenko, I.M. 2015-03-18T19:21:54Z 2015-03-18T19:21:54Z 2000 Technological accelerator with closed electron drift for surface treatment / A.A. Goncharov, A.M. Dobrovolskii, S.N. Pavlov, O.A. Panchenko, I.M. Protsenko // Вопросы атомной науки и техники. — 2000. — № 6. — С. 160-162. — Бібліогр.: 3 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/78561 533.9 Now the technologies of functional covers deriving on large surfaces intensively are developed. For these purposes the plasma sputtering systems of magnetron, vacuum - arc, electron -beam and other types are effectively used. The quality of cover largely depends on preliminary treatment of a surface - its clearing and activation. In the paper is shown, that the anode layer thruster (or the anode layer accelerator – ALA) intensively cleans a surface of target body in a narrow pressure range of working gas in a system. On absolute rate of cleaning (~ 1 nm/s) ALA do not concede to a Kaufman sources. The injection of gas in the accelerator through electrodes with success can be replaced by injection immediately in volume. In this case the rates of sputtering increase approximately twice. The optimal pressure for cleaning essentially will increase, that does ALA compatible with a magnetron on pressure of working gases. This work was supported by the Science and Technology Center of Ukraine under Project 62(J). en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies Technological accelerator with closed electron drift for surface treatment Article published earlier |
| spellingShingle | Technological accelerator with closed electron drift for surface treatment Goncharov, A.A. Dobrovolskii, A.M. Pavlov, S.N. Panchenko, O.A. Protsenko, I.M. Low temperature plasma and plasma technologies |
| title | Technological accelerator with closed electron drift for surface treatment |
| title_full | Technological accelerator with closed electron drift for surface treatment |
| title_fullStr | Technological accelerator with closed electron drift for surface treatment |
| title_full_unstemmed | Technological accelerator with closed electron drift for surface treatment |
| title_short | Technological accelerator with closed electron drift for surface treatment |
| title_sort | technological accelerator with closed electron drift for surface treatment |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/78561 |
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