Bizyukov, A., Kashaba, A., Sereda, K., Sleptsov, V., Danziger, М., & Phiodorov, S. (2000). TiN coating etching from a surface of the instrument in beam-plasma system. Вопросы атомной науки и техники.
Chicago Style (17th ed.) CitationBizyukov, A.A, A.Y Kashaba, K.N Sereda, V.V Sleptsov, М Danziger, and S. Phiodorov. "TiN Coating Etching from a Surface of the Instrument in Beam-plasma System." Вопросы атомной науки и техники 2000.
MLA (8th ed.) CitationBizyukov, A.A, et al. "TiN Coating Etching from a Surface of the Instrument in Beam-plasma System." Вопросы атомной науки и техники, 2000.
Warning: These citations may not always be 100% accurate.