TiN coating etching from a surface of the instrument in beam-plasma system
The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron di...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2000 |
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| Format: | Article |
| Language: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/78562 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
nasplib_isofts_kiev_ua-123456789-78562 |
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Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. 2015-03-18T19:24:36Z 2015-03-18T19:24:36Z 2000 TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/78562 533.9 The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm². This work was supported in part by Science and Technology Center in Ukraine, project #1112. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies TiN coating etching from a surface of the instrument in beam-plasma system Article published earlier |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
| title |
TiN coating etching from a surface of the instrument in beam-plasma system |
| spellingShingle |
TiN coating etching from a surface of the instrument in beam-plasma system Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. Low temperature plasma and plasma technologies |
| title_short |
TiN coating etching from a surface of the instrument in beam-plasma system |
| title_full |
TiN coating etching from a surface of the instrument in beam-plasma system |
| title_fullStr |
TiN coating etching from a surface of the instrument in beam-plasma system |
| title_full_unstemmed |
TiN coating etching from a surface of the instrument in beam-plasma system |
| title_sort |
tin coating etching from a surface of the instrument in beam-plasma system |
| author |
Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. |
| author_facet |
Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. |
| topic |
Low temperature plasma and plasma technologies |
| topic_facet |
Low temperature plasma and plasma technologies |
| publishDate |
2000 |
| language |
English |
| container_title |
Вопросы атомной науки и техники |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| format |
Article |
| description |
The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm².
|
| issn |
1562-6016 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/78562 |
| citation_txt |
TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ. |
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| first_indexed |
2025-12-07T18:51:32Z |
| last_indexed |
2025-12-07T18:51:32Z |
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