TiN coating etching from a surface of the instrument in beam-plasma system
The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron di...
Збережено в:
| Опубліковано в: : | Вопросы атомной науки и техники |
|---|---|
| Дата: | 2000 |
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
|
| Теми: | |
| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/78562 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862725315524034560 |
|---|---|
| author | Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. |
| author_facet | Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. |
| citation_txt | TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm².
|
| first_indexed | 2025-12-07T18:51:32Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-78562 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T18:51:32Z |
| publishDate | 2000 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. 2015-03-18T19:24:36Z 2015-03-18T19:24:36Z 2000 TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/78562 533.9 The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm². This work was supported in part by Science and Technology Center in Ukraine, project #1112. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies TiN coating etching from a surface of the instrument in beam-plasma system Article published earlier |
| spellingShingle | TiN coating etching from a surface of the instrument in beam-plasma system Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. Low temperature plasma and plasma technologies |
| title | TiN coating etching from a surface of the instrument in beam-plasma system |
| title_full | TiN coating etching from a surface of the instrument in beam-plasma system |
| title_fullStr | TiN coating etching from a surface of the instrument in beam-plasma system |
| title_full_unstemmed | TiN coating etching from a surface of the instrument in beam-plasma system |
| title_short | TiN coating etching from a surface of the instrument in beam-plasma system |
| title_sort | tin coating etching from a surface of the instrument in beam-plasma system |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/78562 |
| work_keys_str_mv | AT bizyukovaa tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem AT kashabaay tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem AT seredakn tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem AT sleptsovvv tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem AT danzigerm tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem AT phiodorovs tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem |