The synthesis of TiAlN composites by condensation of the different arc plasma flows
Some properties of the arc-vapour deposited TiAlN films, obtained both – by condensation of the different and combined titanium and aluminium plasma flows, have been investigated. The different flows was provided by two arc evaporators with titanium and aluminium cathodes, at that, the aluminium pla...
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| Zitieren: | The synthesis of TiAlN composites by condensation of the different arc plasma flows / V.S. Taran, V.I. Tereshin, A.I. Timoshenko, O.G. Chechel’nitskij, A.P. Kryshtal’ // Вопросы атомной науки и техники. — 2005. — № 1. — С. 184-186. — Бібліогр.: 5 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859584843267964928 |
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| author | Taran, V.S. Tereshin, V.I. Timoshenko, A.I. Chechel’nitskij, O.G. Kryshtal’, A.P. |
| author_facet | Taran, V.S. Tereshin, V.I. Timoshenko, A.I. Chechel’nitskij, O.G. Kryshtal’, A.P. |
| citation_txt | The synthesis of TiAlN composites by condensation of the different arc plasma flows / V.S. Taran, V.I. Tereshin, A.I. Timoshenko, O.G. Chechel’nitskij, A.P. Kryshtal’ // Вопросы атомной науки и техники. — 2005. — № 1. — С. 184-186. — Бібліогр.: 5 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Some properties of the arc-vapour deposited TiAlN films, obtained both – by condensation of the different and combined titanium and aluminium plasma flows, have been investigated. The different flows was provided by two arc evaporators with titanium and aluminium cathodes, at that, the aluminium plasma was passed through the curvilinear plasma filter. The combined titanium-aluminium plasma was generated by single evaporator with the alloyed TiAl cathodes, which have a volumetric content of aluminium 50 %. The growth rates, surface morphology and the Vickers hardness of the TiAlN films, obtained under the various conditions, have been analyzed. The comparative cutting tool trials with the cemented carbide drills, covered by TiN, TiCN and TiAlN were conducted. It is shown, that the TiAlN film compositions, condensed from different plasma flows with the filtering aluminium plasma, are more profitable and has much higher characteristics, than films, obtained from alloyed TiAl cathodes.
Досліджено властивості композитів TiAlN одержаних із окремих і сполучених потоків титанової та алюмінієвої плазми. Генерування окремих потоків забезпечувалося двома вакуумно-дуговими випаровувачами з титановим і алюмінієвим катодами, причому, алюмінієва плазма проходила через криволінійний плазмовий фільтр, де очищалася від парiв і макрочасток. Сполучений потік титан-алюмінієвої плазми створювався одним випаровувачем з використанням сплавних катодів TiAl, що мiстили 50 об'ємних % алюмінію. Визначено стiйкiстнi характеристики твердосплавного інструменту, зміцненого покриттями TiAlN. Показано, що композити TiAlN, конденсовані з окремих потоків з фiльтрацiєю алюмінієвої плазми, більш рентабельні і мають більш високі характеристики, нiж покриття, одержанi з використанням сплавних катодів.
Исследованы свойства композитов TiAlN полученных конденсацией раздельных и совмещенных потоков титановой и алюминиевой плазмы. Генерирование раздельных потоков обеспечивалось двумя вакуумно- The quantity of holes, N 5 10 15 Fig. 3. The quantity of holes, perforated in tempered steel (HRC 52) with a drills of Mitsubishi Carbide: – uncoated –TiN-coated coated; –TiCN –TiAlN non- filtering –TiAlN with Al-plasma filtering дуговыми испарителями с титановым и алюминиевым катодами, причем, алюминиевая плазма проходила через криволинейный плазменный фильтр, где очищалась от паров и макрочастиц. Совмещенный поток титан-алюминиевой плазмы создавался одним испарителем с использованием сплавных катодов TiAl с объемным содержанием алюминия 50%. Исследованы стойкостные характеристики твердосплавного инструмента, упрочненного покрытиями TiAlN. Показано, что композиты TiAlN, осажденные из раздельных потоков с сепарацией алюминиевой плазмы, более рентабельны и обладают более высокими характеристиками, чем покрытия, полученные с использованием сплавных катодов.
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| first_indexed | 2025-11-27T10:10:00Z |
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THE SYNTHESIS OF TiAlN COMPOSITES BY CONDENSATION OF THE
DIFFERENT ARC PLASMA FLOWS
V.S. Taran 1 , V.I. Tereshin 1 , A.I. Timoshenko 1 , O.G. Chechel’nitskij 1 , A.P. Kryshtal’ 2
1 IPP NSC KIPT, Akademicheskaya St.1, 61108 Kharkov,Ukraine;
2 Kharkov National University, Kharkov, Ukraine
Some properties of the arc-vapour deposited TiAlN films, obtained both – by condensation of the different and
combined titanium and aluminium plasma flows, have been investigated. The different flows was provided by two arc
evaporators with titanium and aluminium cathodes, at that, the aluminium plasma was passed through the curvilinear
plasma filter. The combined titanium-aluminium plasma was generated by single evaporator with the alloyed TiAl
cathodes, which have a volumetric content of aluminium 50 %. The growth rates, surface morphology and the Vickers
hardness of the TiAlN films, obtained under the various conditions, have been analyzed. The comparative cutting tool
trials with the cemented carbide drills, covered by TiN, TiCN and TiAlN were conducted. It is shown, that the TiAlN
film compositions, condensed from different plasma flows with the filtering aluminium plasma, are more profitable and
has much higher characteristics, than films, obtained from alloyed TiAl cathodes.
PACS: 52.77.-j
1. INTRODUCTION
Among the much variety of coatings, used for the
tools hardening, TiAlN composites attract the special
attention due to their valuable properties [1]. By such
parameters, us resistance to temperature oxidation, “hot”
hardness, friction coefficient and flexibility, they exceed
the widely used TiN, TiC, CrN and Mo2N coatings [2].
These properties were attributed to a stable aluminum
oxide layer formed at the working surface [3]. TiAlN-
composites keep his characteristics up to 925oC [4], what
makes its irreplaceable during high-speed cutting of
difficult-to-machine materials. TiN, for example, is stable
only up to 550oC [4]. The Al2O3 acts also as the dry
lubrication, providing low friction in a contacting area. As
a result, the impact and thermal loads tend to decrease,
improving the wear resistance. The life-time of tool with
the TiAlN coating increases by 2 – 4 times in comparison
with TiC and TiCN ones. The rate of metal removing
increases also by 2 – 4 times in comparison with TiN
coating, and relatively to the coatless tool it runs up to 10
times [5].
However, the synthesis of such coatings by vacuum-arc
methods has some difficulties. Aluminum is an easily
melted metal and its plasma contains a great quantity of
vapor phase and droplets. Its dimension may reach several
tens of micrometers. Such droplets reduce the hardness
and smoothness of the films. The alloyed TiAl-cathodes
with 20-60 vol. % of Al are commonly used for the
synthesis of such coatings. The melting point of this alloy
is higher then of pure aluminum, and, respectively, the
amount of droplets and vapors contained in plasma are
decreased. At the same time, the alloyed cathodes are
much more expensive then pure Al or Ti ones. This, in
turn, adversely affects the profitability of the resulting
product. In addition, the amount of droplets in coatings
continues to be high. Therefore, the advantage of the
TiAlN composites does not exhibits completely.
The performance of such coatings may be improved by
eliminating of the macro-particles from a plasma flow. In
present work we have compared some properties of
TiAlN-composites, obtained by two methods in a
framework of vacuum-arc deposition technology.
2. EXPERIMENT
The experiments were carried out on a “Bulat-9”
plant, equipped with a plasma filter (Fig.1). The sources
of Al-plasma, containing cathode units (1), (9) with an
Al-cathode, stabilizing coil (2) and a focusing coil (3), is
fixed on a cubic plasma guide (4). The deflecting coil (6)
with the coils (3) and (7) form the curvilinear magnetic
field with the strength up to 150 Gauss. In this field the
Al plasma deviates on 90o and condenses onto a tool
surface free from macro-particles and vapor phase. The
similar plasma source (5) with a titanium cathode is
placed on the plasma guide (4) opposite to the entrance to
the chamber. Such configuration allows obtaining just
composite coatings, but no multi-layer ones, as in a case,
when the plasma flows reach the surface of condensation
from various directions. By changing the arc current in
titanium evaporator from 40 to 160A as well as the
magnetic field of solenoids (3) from 0 to 40 Gauss, one
can change the deposition rate of Ti-layer in a range 2 –
14 μm/h. The same procedure allowed varying the grows
of Al-condensate from 1.5 to 10 μm/h. It makes possible
to obtain TiAl-composition with a wide range of relative
percentage Ti and Al in the coating during the
simultaneous working of three evaporators.
This films was compared with the coatings, obtained from
a direct (non-filtered) and filtered plasma flows,
generated by alloyed TiAl cathodes with 50 vol. % Al.
The coatings were deposited onto the polished stainless
steel plates 20 ¿ 20Ч2 мм3 and on the surface of the
cemented carbide drills, made by Mitsubishi Carbide. The
surface topography was analyzed by scanning electron
microscopy. The hardness was measured by PMT-3
hardness-analyzer. The comparative cutting toll tests have
been carried out with use the industrial equipment in
Drogobych chisel plant.
3. RESULTS
Fig. 2 shows the SEM micrographs of surfaces of
TiAlN coatings deposited: a) – from a direct (non-filtered)
TiAl-plasma flow (alloyed TiAl-cathode); b) – from a
filtered TiAl-plasma flow (alloyed TiAl-cathode); c) –
from two: direct titanium and filtered aluminum plasma
flows (Fig. 1). The thickness of coatings was 10 μm.
The comparison of figs. 2a) and 2b) shows the
efficiency of the plasma filter, and the figs. 2a) and 2c)
demonstrate the difference in a content of droplets in a
plasmas generated by TiAl- and Ti-cathodes. The
hardness of TiAlN-coating on fig. 2a) does not exceed
2700 HV, whereas the films, obtained by condensation of
fully (2b) or partially (2c) filtered plasma, has the
hardness up to 4300 HV.
The performance of TiAlN coatings 2а) and 2c), and
TiN and TiCN, condensed from non-filtered titanium
plasma, were estimated during comparative tests of
cemented carbide drills, made by Mitsubishi Carbide. The
drills were coated after its re-sharpening. The maximum
quantity of holes, perforated in tempered steel with a
RHC of 52, was served as a criterion for wear resistance
of drills with a various coatings. As shown in Fig. 3, the
uncoated drills make 4 – 5 holes until failure. The TiN
coated drills perform 6 – 7 holes. The TiAlN obtained
from the alloyed cathode allowed to drill near 15 holes,
and drills, coated by TiAlN, deposited from separated
flows with the filtering Al-plasma perform up to 20 holes.
The last result, evidently, was obtained due to a much
more perfect structure of the coatings, which not contain
the Al-droplets. Besides, the high smoothness of the
surface reduces in the friction coefficient and,
Fig. 1. Experimental plant. I, II -The plasma
sources with the Al-cathodes; 1, 9 - cathodic units;
2 - stabilizing coil; 3 - focusing coil; 4 - plasma
guide. III - The plasma source with the Ti-cathode;
5 - cathodic unit; 6 - deflecting coil; 7 - output coil;
8 - chamber; 10 - Al-plasma; 11 - Ti-plasma
I
II
III
Fig. 2. SEM micrographs showing the topography of TiAlN surfaces condensed а) from non-filtered TiAl-
plasma flow (alloyed TiAl-cathode); b) from a filtered TiAl-plasma flow (alloyed TiAl-cathode); c) from
two: non-filtered titanium and filtered aluminum plasma flows. The thickness is 10 μm
а b c
respectively, in dynamics and thermal load, applied to the
cutting edge.
Notwithstanding the fact that hardness of TiAlN-
coatings, obtained from alloyed cathodes, and TiN ones is
almost identical, the wear-resistance of TiN coated drills
were noticeably lower. Evidently, in this case the much
higher flexibility and thermo-stability of TiAlN coatings
have exhibited as compared to the TiN.
At the same time, the alloyed TiAl-cathodes are almost
in order expensive of the Ti- or Al-ones. This fact, and
high performance of TiAlN-composites, obtained by
condensation of Ti- and filtering Al-plasmas, point out to
advisability of the usage of plasma-filters in this
technology.
4. CONCLUSIONS
The variant of the synthesis of TiAlN coatings from
different Ti- and Al-plasma flows with the aluminium
plasma filtering has been examined. This method allows
to obtain such composites with a widely range of its Al
content without reducing the growth rate.
These coatings are remarkable by its high hardness (4300
HV) and wear resistance (1.5 times higher as to coatings
obtained from alloyed TiAl cathodes).
The application of plasma filter in this case not only
improves the coatings performance but is also more
profitable as compared to usage of the alloyed cathodes.
REFERENCES
[1] Knotek et al.// Proc. of the 11th Int. Plansee Seminar
(1). 1985, pp. 677 – 691.
[2] B.F. Coll, P. Sathrum, R. Fontana // Surf. Coat. Technol.
(52). 1992, pp. 57-64.
[3] Da-Yung Wang, Yen-Way Li, Chi-Long Chang, Wei-
Yu Ho// Surf. Coat. Technol. (114). 1999, pp.109-113.
[4] E.J.Bienk, H.Reitz, N.J. Mikkelsen // Surf. Coat.
Technol. (76/77). 1995, p. 475.
[5] H. Jehn, S. Hofmann // Thin Solid Films (153). 1987,
pp. 45-53.
СИНТЕЗ КОМПОЗИТОВ TiAlN ПУТЕМ КОНДЕНСАЦИИ РАЗЛИЧНЫХ ПОТОКОВ ВАКУУМНО-
ДУГОВОЙ ПЛАЗМЫ
В.С. Таран, В.И. Терешин, А.И. Тимошенко, О.Г. Чечельницкий, А. П. Крышталь
Исследованы свойства композитов TiAlN полученных конденсацией раздельных и совмещенных потоков
титановой и алюминиевой плазмы. Генерирование раздельных потоков обеспечивалось двумя вакуумно-
Th
e
qu
an
tit
y
of
h
ol
es
, N
5
10
15
Fig. 3. The quantity of holes, perforated in tempered
steel (HRC 52) with a drills of Mitsubishi Carbide:
– uncoated –TiN-coated
coated; –TiCN –TiAlN non- filtering
–TiAlN with Al-plasma filtering
дуговыми испарителями с титановым и алюминиевым катодами, причем, алюминиевая плазма проходила
через криволинейный плазменный фильтр, где очищалась от паров и макрочастиц. Совмещенный поток
титан-алюминиевой плазмы создавался одним испарителем с использованием сплавных катодов TiAl с
объемным содержанием алюминия 50%. Исследованы стойкостные характеристики твердосплавного
инструмента, упрочненного покрытиями TiAlN. Показано, что композиты TiAlN, осажденные из раздельных
потоков с сепарацией алюминиевой плазмы, более рентабельны и обладают более высокими
характеристиками, чем покрытия, полученные с использованием сплавных катодов.
СИНТЕЗ КОМПОЗИТІВ TiAlN ШЛЯХОМ КОНДЕНСАЦІЇ РІЗНИХ ПОТОКІВ
ВАКУУМНО-ДУГОВОЇ ПЛАЗМИ
В.С. Таран, В.I. Терешин, А.І. Тимошенко, О.Г. Чечельницкий, А. П. Кришталь
Досліджено властивості композитів TiAlN одержаних із окремих і сполучених потоків титанової та
алюмінієвої плазми. Генерування окремих потоків забезпечувалося двома вакуумно-дуговими випаровувачами
з титановим і алюмінієвим катодами, причому, алюмінієва плазма проходила через криволінійний плазмовий
фільтр, де очищалася від парiв і макрочасток. Сполучений потік титан-алюмінієвої плазми створювався одним
випаровувачем з використанням сплавних катодів TiAl, що мiстили 50 об'ємних % алюмінію.
Визначено стiйкiстнi характеристики твердосплавного інструменту, зміцненого покриттями TiAlN. Показано,
що композити TiAlN, конденсовані з окремих потоків з фiльтрацiєю алюмінієвої плазми, більш рентабельні і
мають більш високі характеристики, нiж покриття, одержанi з використанням сплавних катодів.
|
| id | nasplib_isofts_kiev_ua-123456789-79156 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-11-27T10:10:00Z |
| publishDate | 2005 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Taran, V.S. Tereshin, V.I. Timoshenko, A.I. Chechel’nitskij, O.G. Kryshtal’, A.P. 2015-03-26T18:22:44Z 2015-03-26T18:22:44Z 2005 The synthesis of TiAlN composites by condensation of the different arc plasma flows / V.S. Taran, V.I. Tereshin, A.I. Timoshenko, O.G. Chechel’nitskij, A.P. Kryshtal’ // Вопросы атомной науки и техники. — 2005. — № 1. — С. 184-186. — Бібліогр.: 5 назв. — англ. 1562-6016 PACS: 52.77.-j https://nasplib.isofts.kiev.ua/handle/123456789/79156 Some properties of the arc-vapour deposited TiAlN films, obtained both – by condensation of the different and combined titanium and aluminium plasma flows, have been investigated. The different flows was provided by two arc evaporators with titanium and aluminium cathodes, at that, the aluminium plasma was passed through the curvilinear plasma filter. The combined titanium-aluminium plasma was generated by single evaporator with the alloyed TiAl cathodes, which have a volumetric content of aluminium 50 %. The growth rates, surface morphology and the Vickers hardness of the TiAlN films, obtained under the various conditions, have been analyzed. The comparative cutting tool trials with the cemented carbide drills, covered by TiN, TiCN and TiAlN were conducted. It is shown, that the TiAlN film compositions, condensed from different plasma flows with the filtering aluminium plasma, are more profitable and has much higher characteristics, than films, obtained from alloyed TiAl cathodes. Досліджено властивості композитів TiAlN одержаних із окремих і сполучених потоків титанової та алюмінієвої плазми. Генерування окремих потоків забезпечувалося двома вакуумно-дуговими випаровувачами з титановим і алюмінієвим катодами, причому, алюмінієва плазма проходила через криволінійний плазмовий фільтр, де очищалася від парiв і макрочасток. Сполучений потік титан-алюмінієвої плазми створювався одним випаровувачем з використанням сплавних катодів TiAl, що мiстили 50 об'ємних % алюмінію. Визначено стiйкiстнi характеристики твердосплавного інструменту, зміцненого покриттями TiAlN. Показано, що композити TiAlN, конденсовані з окремих потоків з фiльтрацiєю алюмінієвої плазми, більш рентабельні і мають більш високі характеристики, нiж покриття, одержанi з використанням сплавних катодів. Исследованы свойства композитов TiAlN полученных конденсацией раздельных и совмещенных потоков титановой и алюминиевой плазмы. Генерирование раздельных потоков обеспечивалось двумя вакуумно- The quantity of holes, N 5 10 15 Fig. 3. The quantity of holes, perforated in tempered steel (HRC 52) with a drills of Mitsubishi Carbide: – uncoated –TiN-coated coated; –TiCN –TiAlN non- filtering –TiAlN with Al-plasma filtering дуговыми испарителями с титановым и алюминиевым катодами, причем, алюминиевая плазма проходила через криволинейный плазменный фильтр, где очищалась от паров и макрочастиц. Совмещенный поток титан-алюминиевой плазмы создавался одним испарителем с использованием сплавных катодов TiAl с объемным содержанием алюминия 50%. Исследованы стойкостные характеристики твердосплавного инструмента, упрочненного покрытиями TiAlN. Показано, что композиты TiAlN, осажденные из раздельных потоков с сепарацией алюминиевой плазмы, более рентабельны и обладают более высокими характеристиками, чем покрытия, полученные с использованием сплавных катодов. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies The synthesis of TiAlN composites by condensation of the different arc plasma flows Синтез композитів TiAlN шляхом конденсації різних потоків вакуумно-дугової плазми Синтез композитов TiAlN путем конденсации различных потоков вакуумно- дуговой плазмы Article published earlier |
| spellingShingle | The synthesis of TiAlN composites by condensation of the different arc plasma flows Taran, V.S. Tereshin, V.I. Timoshenko, A.I. Chechel’nitskij, O.G. Kryshtal’, A.P. Low temperature plasma and plasma technologies |
| title | The synthesis of TiAlN composites by condensation of the different arc plasma flows |
| title_alt | Синтез композитів TiAlN шляхом конденсації різних потоків вакуумно-дугової плазми Синтез композитов TiAlN путем конденсации различных потоков вакуумно- дуговой плазмы |
| title_full | The synthesis of TiAlN composites by condensation of the different arc plasma flows |
| title_fullStr | The synthesis of TiAlN composites by condensation of the different arc plasma flows |
| title_full_unstemmed | The synthesis of TiAlN composites by condensation of the different arc plasma flows |
| title_short | The synthesis of TiAlN composites by condensation of the different arc plasma flows |
| title_sort | synthesis of tialn composites by condensation of the different arc plasma flows |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/79156 |
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