Increasing of mass transfer efficiency at magnetron deposition of metal coating
The results of technological tests of longitudinal planar magnetron sputtering system (MSS) with a magnetically isolated anode working in pulse-modes with additional pulse heavy-current high-voltage supply source are presented. It is shown that efficiency of mass transfer in the pulse mode overcoati...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2015 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2015
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/82146 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Increasing of mass transfer efficiency at magnetron deposition of metal coating / A.G. Chunadra, K.N. Sereda, I.K. Tarasov, A.A. Bizyukov // Вопросы атомной науки и техники. — 2015. — № 1. — С. 181-183. — Бібліогр.: 4 назв. — англ. |
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