Impact of N₂+H₂ mixture plasma on carbon-containing film
The short review is done of published data on impact of plasma produced in the N₂+H₂ mixture on carbon and organic films. It is concluded that such plasma can be much more effective in cleaning of the walls of fusion devices from a carbon-based contaminating deposit in comparison with plasmas of...
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| Veröffentlicht in: | Вопросы атомной науки и техники |
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| Datum: | 2006 |
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2006
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| Schlagworte: | |
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/82153 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Impact of N₂+H₂ mixture plasma on carbon-containing film / V.S. Voitsenya, S. Masuzaki, O. Motojima, A. Sagara, W. Jacob // Вопросы атомной науки и техники. — 2006. — № 6. — С. 141-143. — Бібліогр.: 16 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | The short review is done of published data on impact of plasma produced in the N₂+H₂ mixture on carbon and
organic films. It is concluded that such plasma can be much more effective in cleaning of the walls of fusion devices
from a carbon-based contaminating deposit in comparison with plasmas of discharges in H₂, Ar or He.
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| ISSN: | 1562-6016 |