Plasma and ion beam surface modification at Lawrence Berkeley National Laboratory
Surface processing by metal plasma and ion beams can be effected using the dense metal plasma formed in a vacuum arc discharge embodied either in a “metal plasma immersion” configuration or as a vacuum arc ion source. In the former case the substrate is immersed in the plasma and repetitively pulse-...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2000 |
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/82401 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Plasma and ion beam surface modification at Lawrence Berkeley National Laboratory / I. Brown // Вопросы атомной науки и техники. — 2000. — № 3. — С. 133-137. — Бібліогр.: 29 назв. — англ. |