Plasma and ion beam surface modification at Lawrence Berkeley National Laboratory

• Published in: Вопросы атомной науки и техники
• Date: 2000
• Main Author: Brown, I.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2000
• Subjects: Low Temperature Plasma and Plasma Technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82401
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Plasma and ion beam surface modification at Lawrence Berkeley National Laboratory / I. Brown // Вопросы атомной науки и техники. — 2000. — № 3. — С. 133-137. — Бібліогр.: 29 назв. — англ.

Surface processing by metal plasma and ion beams can be effected using the dense metal plasma formed in a vacuum arc discharge embodied either in a “metal plasma immersion” configuration or as a vacuum arc ion source. In the former case the substrate is immersed in the plasma and repetitively pulse-...