APA (7th ed.) Citation

Vozniy, O., Yeom, G., & Kropotov, A. (2007). Plasma potential influence on ion energy Distribution function in ICP source. Физическая инженерия поверхности.

Chicago Style (17th ed.) Citation

Vozniy, O.V, G.Y Yeom, and A.Yu Kropotov. "Plasma Potential Influence on Ion Energy Distribution Function in ICP Source." Физическая инженерия поверхности 2007.

MLA (8th ed.) Citation

Vozniy, O.V, et al. "Plasma Potential Influence on Ion Energy Distribution Function in ICP Source." Физическая инженерия поверхности, 2007.

Warning: These citations may not always be 100% accurate.