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Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods
Improvement of physical, mechanical and chemical properties of thin nitride films depends on the methods of their deposition and improvement of the structure, which determines the obtained properties. In the production of nitride films, which are promising in solid-state microelectronics and instrum...
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| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Інститут енергетичних машин і систем ім. А. М. Підгорного Національної академії наук України
2014
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| Subjects: | |
| Online Access: | https://journals.uran.ua/jme/article/view/19925 |
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