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Simulation of ion-atom interactions at the corpuscular bombardment of the surface of steel samples
In the paper the problem of modeling of ionic implantation as the technology of influence on the surface properties of materials is solved. On the basis of existing physical models computer program "RIO" is developed. Capabilities of the software allow us to calculate the penetration depth...
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Format: | Article |
Language: | Russian |
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Інститут енергетичних машин і систем ім. А. М. Підгорного Національної академії наук України
2014
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Online Access: | https://journals.uran.ua/jme/article/view/35909 |
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