Синтез та фізико-хімічні властивості нанорозмірного діоксиду ванадію на поверхні кремнію

The method of molecular layering ? atomic layer deposition with varied conditions of synthesis has been used to obtain two- and tree-dimensional nanostructures of vanadium dioxide on single-crystal silicon surface. A growth mechanism for nanostructures of various dimensionalities has been proposed b...

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Bibliographic Details
Date:2011
Main Authors: Nazarov, D. V., Osmolowskaya, O. M., Smirnov, V. M., Murin, I. V., Glumov, O. V., Mel'nikova, N. A.
Format: Article
Language:Russian
Published: Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine 2011
Online Access:https://www.cpts.com.ua/index.php/cpts/article/view/123
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Journal Title:Chemistry, Physics and Technology of Surface

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Chemistry, Physics and Technology of Surface