Нестехіометричний оксид кремнію SiOx (x < 2)

The review is devoted to the analysis of experimentally and theoretically obtained data on the methods of synthesis, structure and properties of non-stoichiometric silicon oxide SiOx (x <2) in a wide range of the oxygen content. The main areas of application of silicon suboxide in micro-...

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Bibliographic Details
Date:2019
Main Authors: Filonenko, O. V., Lobanov, V. V.
Format: Article
Language:Ukrainian
Published: Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine 2019
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Online Access:https://surfacezbir.com.ua/index.php/surface/article/view/659
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Journal Title:Surface
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Surface