Ударостойкие защитные пленочные покрытия на основе AlN в электронной технике
For the formation of AlN protective coatings resistant to impact loads, magnetron and diode sputtering methods, as well as ion beam sputtering, are suitable. Depending on the process conditions, different contents of X-ray amorphous and crystalline phases are obtained in the volume of nanostructured...
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| Datum: | 2005 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2005
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.5.35 |
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| Назва журналу: | Technology and design in electronic equipment |