Получение наноструктурированных пленок AlN и ZnO и их применение в электронной технике

• Date: 2005
• Main Authors: Belyanin, A. F., Samoylovich, M. I., Kovalskiy, K. A., Petukhov, K. Yu.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2005
• Subjects: наноматериалы; магнетронное распыление; слоистые структуры; акусто- и эмиссионная электроника
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.4.46
• Journal Title: Technology and design in electronic equipment

The design features of the sputtering system in a magnetron sputtering installation and the conditions for forming AlN and ZnO films with controlled composition and crystalline phase structure are considered. The conditions for obtaining and the operational characteristics of layered structures in...