Лазерное текстурирование поверхности предварительно нагретого монокристалла кремния

• Datum: 2005
• 1. Verfasser: Krapivko, H. I.
• Format: Artikel
• Sprache: Ukrainisch
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2005
• Schlagworte: лазерное воздействие; кремний; текстурирование поверхности
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2005.2.53
• Назва журналу: Technology and design in electronic equipment

A method of laser engraving based on effective modification of the crystal lattice during the formation of a textured silicon crystal surface has been implemented. It is shown that for burning silicon at the phase transition, a laser with pulse power much lower than that required in the solid phas...