Метод проектирования топологии тонкопленочной микросборки с размерами пленочных элементов 10–50 мкм

• Date: 2004
• Main Author: Spirin, V. G.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2004
• Subjects: проектирование; топология; тонкопленочная микросборка; размеры резисторов
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2004.5.06
• Journal Title: Technology and design in electronic equipment

The proposed method makes it possible to design thin-film elements with minimum sizes of 10–50 μm. The increase in microassembly integration is achieved by compensating for systematic errors in the structural parameters of thin-film elements, by modifying the algorithm for calculating resistor dimen...