Формирование столбиковых выводов для GaAs пиксельных детекторов

• Date: 2004
• Main Authors: Berishvili, Z. V., Jangidze, L. V., Skhiladze, G. A., Melkadze, R. G., Lezhneva, T. M., Peradze, G. G.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2004
• Subjects: гибридный детектор; флип-чип-технология; столбиковый вывод; арсенид галлия
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2004.4.43
• Journal Title: Technology and design in electronic equipment

In the fabrication of hybrid ionizing radiation pixel detectors, the sensor array is connected to the readout device using columnar interconnects via flip-chip technology. A process for forming Pb/Sn and In columnar interconnects on GaAs sensor arrays has been developed and investigated. A TiW/Ag sy...