Кинетика десорбционной очистки поверхности кремниевых пластин в перекисно-аммиачных растворах

• Date: 2003
• Main Authors: Poltavtsev, Yu. G., Virchenko, P. T., Kostyuk, V. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2003
• Subjects: кремниевые пластины; перекисно-аммиачные растворы; десорбция; химическая обработка
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2003.6.59
• Journal Title: Technology and design in electronic equipment

The paper investigates desorption of cations (Na⁺, Fe³⁺, Cu²⁺, Ag⁺) and atoms (Au), as well as anions S²⁻ and Cl⁻ from the surface of silicon wafers KDB-10 with orientations (100) and (110) during treatment at 70 °C in peroxide–ammonia solutions of three compositions. The method of radioactive isoto...