Оценка технологического процесса изготовления СБИС по стабильности элементов ее структуры

• Date: 2003
• Main Authors: Vanteev, A. M., Korobov, A. I.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2003
• Subjects: СБИС; технологический процесс; стабильность элементов; деградационные процессы; ускоренные испытания
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2003.2.33
• Journal Title: Technology and design in electronic equipment

The method of test circuits used in VLSI production is proposed to be supplemented with a technique for identifying time‑unstable elements of the physical structure of the product using a degradation process model. The possibility of conducting accelerated tests on structural elements is demonstrate...