Влияние облучения быстрыми нейтронами на эпитаксиальный арсенид галлия
The paper demonstrates the possibility of controlling the parameters of gallium arsenide epitaxial layers using radiation treatment with fast neutrons. From a technological perspective, neutron irradiation is proposed to be divided into two types depending on the radiation dose. The first one (radia...
Gespeichert in:
| Veröffentlicht in: | Технологія та конструювання в електронній апаратурі |
|---|---|
| Datum: | 2002 |
| Heft: | 6 |
| Сторінки: | 7-9 |
| ISSN: | 3083-6549 |
| Автори та афіліації: |
|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2002
|
| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2002.6.07 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Technology and design in electronic equipment |
| Завантажити файл: | |
Institution
Technology and design in electronic equipment| Zusammenfassung: | The paper demonstrates the possibility of controlling the parameters of gallium arsenide epitaxial layers using radiation treatment with fast neutrons. From a technological perspective, neutron irradiation is proposed to be divided into two types depending on the radiation dose. The first one (radiation doses up to 1·1015 cm–2) can serve as a means of improving the properties of the layers by increasing carrier mobility and operation speed. The second one (radiation doses exceeding 5·1015 cm–2) reduces the concentration and mobility of charge carriers. |
|---|---|
| ISSN: | 3083-6549 |