Поліпшення параметрів кремнієвих варикапів при використанні лазерного гетерування

Поліпшення параметрів кремнієвих варикапів при використанні лазерного гетерування

The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyze...

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Bibliographic Details
Date:2018
Main Authors: Vikulin, I. M., Litvinenko, V. N., Shutov, S. V., Maronchuk, A. I., Demenskiy, A. N., Glukhova, V. I.
Format: Article
Language:English
Published: PE "Politekhperiodika", Book and Journal Publishers 2018
Subjects:
гетерування
зворотний струм
кремній
домішки
варикап
Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2018.2.29
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment
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Summary:The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyzed.

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