Омические контакты к материалам на основе нитрида индия

• Datum: 2016
• 1. Verfasser: Sai, P. O.
• Format: Artikel
• Sprache: English
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2016
• Schlagworte: омический контакт; нитрид индия; удельное контактное сопротивление; быстрая термическая обработка
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2016.4-5.03
• Назва журналу: Technology and design in electronic equipment

The key aspects of ohmic contact formation to InN-based materials were investigated. Detailed analysis of studies conducted over the past three decades, allows determining the basic principles of such contacts. The contact structure properties and optimal conditions for them are presented. Different...