Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат
Modernization of horizontal low pressure deposition system has been performed. The liquid source delivery system using the bubblers has been developed. The PSG and BPSG film deposition processes and film properties using TEOS – Dimethylphosphite – TEB system have been studied. It is shown that the u...
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| Datum: | 2015 |
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| Format: | Artikel |
| Sprache: | Englisch |
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PE "Politekhperiodika", Book and Journal Publishers
2015
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| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.49 |
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| Назва журналу: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| _version_ | 1856543808845512704 |
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| author | Turtsevich, A. S. Nalivaiko, O. Yu. |
| author_facet | Turtsevich, A. S. Nalivaiko, O. Yu. |
| author_sort | Turtsevich, A. S. |
| baseUrl_str | |
| collection | OJS |
| datestamp_date | 2025-05-30T19:33:09Z |
| description | Modernization of horizontal low pressure deposition system has been performed. The liquid source delivery system using the bubblers has been developed. The PSG and BPSG film deposition processes and film properties using TEOS – Dimethylphosphite – TEB system have been studied. It is shown that the use of dimethylphosphite allows varying the phosphorus concentration in the wide range. It is found that the optimal range of the total boron and phosphorus concentration ensuring the acceptable topology planarity and resistance to defect formation during storage is 8.7 – 0.3 wt% when the phosphorus concentration is 3.0 – 3.8 wt%. It is found that at use of the TEOS – DMP – TEB system the depletion of the phosphorus concentration along the reaction zone does not occur, and the total dopant concentration is practically constant. At the same time, the deposition rate of BPSG films is 9.0 – 10.0 nm/min and the good film thickness uniformity is ensured. The as-deposited films have “mirror-like surface” that is proof of minimal surface roughness. The BPSG films with optimal composition are characterized by the reduced reaction capability against atmospheric moisture. |
| first_indexed | 2025-09-24T17:30:41Z |
| format | Article |
| id | oai:tkea.com.ua:article-294 |
| institution | Technology and design in electronic equipment |
| language | English |
| last_indexed | 2025-09-24T17:30:41Z |
| publishDate | 2015 |
| publisher | PE "Politekhperiodika", Book and Journal Publishers |
| record_format | ojs |
| spelling | oai:tkea.com.ua:article-2942025-05-30T19:33:09Z Deposition of borophosphosilicate glass films using the TEOS – dimethylphosphite – trimethylborate system Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат Turtsevich, A. S. Nalivaiko, O. Yu. borophosphatesilicate glass deposition topological relief planarity борофосфоросиликатное стекло осаждение планарность топологического рельефа Modernization of horizontal low pressure deposition system has been performed. The liquid source delivery system using the bubblers has been developed. The PSG and BPSG film deposition processes and film properties using TEOS – Dimethylphosphite – TEB system have been studied. It is shown that the use of dimethylphosphite allows varying the phosphorus concentration in the wide range. It is found that the optimal range of the total boron and phosphorus concentration ensuring the acceptable topology planarity and resistance to defect formation during storage is 8.7 – 0.3 wt% when the phosphorus concentration is 3.0 – 3.8 wt%. It is found that at use of the TEOS – DMP – TEB system the depletion of the phosphorus concentration along the reaction zone does not occur, and the total dopant concentration is practically constant. At the same time, the deposition rate of BPSG films is 9.0 – 10.0 nm/min and the good film thickness uniformity is ensured. The as-deposited films have “mirror-like surface” that is proof of minimal surface roughness. The BPSG films with optimal composition are characterized by the reduced reaction capability against atmospheric moisture. Проведена модернизация горизонтального реактора пониженного давления. Разработана система подачи жидкого реагента с использованием барботеров. Исследованы процессы осаждения пленок и свойства пленок фосфосиликатного и борофосфосиликатного стекла с использованием системы ТЭОС – диметилфосфит (ДМФ) – триметилборат (ТМФ). PE "Politekhperiodika", Book and Journal Publishers 2015-02-24 Article Article Peer-reviewed Article application/pdf https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.49 10.15222/TKEA2015.1.49 Technology and design in electronic equipment; No. 1 (2015): Tekhnologiya i konstruirovanie v elektronnoi apparature; 49-58 Технологія та конструювання в електронній апаратурі; № 1 (2015): Технология и конструирование в электронной аппаратуре; 49-58 3083-6549 3083-6530 en https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.49/260 Copyright (c) 2015 Turtsevich A. S., Nalivaiko O. Y. http://creativecommons.org/licenses/by/4.0/ |
| spellingShingle | борофосфоросиликатное стекло осаждение планарность топологического рельефа Turtsevich, A. S. Nalivaiko, O. Yu. Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат |
| title | Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат |
| title_alt | Deposition of borophosphosilicate glass films using the TEOS – dimethylphosphite – trimethylborate system |
| title_full | Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат |
| title_fullStr | Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат |
| title_full_unstemmed | Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат |
| title_short | Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат |
| title_sort | осаждение пленок борофосфоросиликатного стекла с использованием системы тэос – диметилфосфит – триметилборат |
| topic | борофосфоросиликатное стекло осаждение планарность топологического рельефа |
| topic_facet | borophosphatesilicate glass deposition topological relief planarity борофосфоросиликатное стекло осаждение планарность топологического рельефа |
| url | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.49 |
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