Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат
Modernization of horizontal low pressure deposition system has been performed. The liquid source delivery system using the bubblers has been developed. The PSG and BPSG film deposition processes and film properties using TEOS – Dimethylphosphite – TEB system have been studied. It is shown that the u...
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| Date: | 2015 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2015
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.49 |
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| Journal Title: | Technology and design in electronic equipment |