Влияние параметров ВЧ-разряда и параметров нагревателя на температуру подложки в плазмохимическом реакторе «Алмаз» для синтеза углеродных алмазоподобных пленок
The paper presents the research results on the device for obtaining diamond-like films from gas phase, constructed and tested in the Institute for Nuclear Research of the National Academy of Sciences. The device is based on a high-frequency (HF) discharge (13,56 MHz) into controlled crossed magnetic...
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| Date: | 2014 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2014
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.5-6.39 |
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| Journal Title: | Technology and design in electronic equipment |