Ионизационный отжиг полупроводниковых кристаллов. Часть вторая: эксперимент

• Date: 2014
• Main Authors: Garkavenko, A. S., Mokritskii, V. A., Banzak, O. V., Zavadskii, V. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2014
• Subjects: лазер; отжиг; электронный пучок
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.5-6.51
• Journal Title: Technology and design in electronic equipment

There is a conception that irradiation of semiconductor crystals with high energy electrons (300 keV) results in a significant and irreversible deterioration of their electrical, optical and structural properties. Semiconductors are typically irradiated by low voltage electron accelerators with a co...