Наноструктурированные антидиффузионные слои в контактах к широкозонным полупроводникам

The interrelation between the antidiffusion properties of titanium diboride films and their nanocrystalline structure is investigated. We made a valid assumption that the main reason for degradation of contacts with TiB2-based diffusion layers is diffusion through the TiB2 film through dislocations...

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Bibliographische Detailangaben
Datum:2013
1. Verfasser: Kudryk, Ya. Ya.
Format: Artikel
Sprache:Ukrainian
Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2013
Schlagworte:
Online Zugang:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.6.03
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment