Наноструктурированные антидиффузионные слои в контактах к широкозонным полупроводникам
The interrelation between the antidiffusion properties of titanium diboride films and their nanocrystalline structure is investigated. We made a valid assumption that the main reason for degradation of contacts with TiB2-based diffusion layers is diffusion through the TiB2 film through dislocations...
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| Datum: | 2013 |
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| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | Ukrainian |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2013
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.6.03 |
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| Назва журналу: | Technology and design in electronic equipment |