Получение пригодного для сенсорики пористого кремния методом неэлектролитического травления MacEtch

• Date: 2013
• Main Author: Iatsunskyi, I. R.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2013
• Subjects: пористый кремний; неэлектролитическое (химическое) травление
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.6.52
• Journal Title: Technology and design in electronic equipment

The author suggests using the etching method MacEtch (metal-assisted chemical etching) for production of micro- and nanostructures of porous silicon. The paper presents research results on the morphology structures obtained at different parameters of deposition and etching processes. The research ha...